1

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

Year:
2015
Language:
english
File:
PDF, 10.45 MB
english, 2015
3

Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process

Year:
2018
Language:
english
File:
PDF, 3.46 MB
english, 2018
4

A maskless wet etching silicon dioxide post-CMOS process and its application

Year:
2006
Language:
english
File:
PDF, 1.68 MB
english, 2006
19

Manufacture of Radio Frequency Micromachined Switches with Annealing

Year:
2014
Language:
english
File:
PDF, 903 KB
english, 2014
22

Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

Year:
2007
Language:
english
File:
PDF, 2.27 MB
english, 2007
29

Micro FET pressure sensor manufactured using CMOS-MEMS technique

Year:
2008
Language:
english
File:
PDF, 1.15 MB
english, 2008
41

A resonant method for determining mechanical properties of Si3N4 and SiO2 thin films

Year:
2007
Language:
english
File:
PDF, 404 KB
english, 2007